5/12/2011	9:25:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/12/2011	9:25:46 AM	Recipe started at 9:25 AM
5/12/2011	9:25:46 AM	Helium valve closed
5/12/2011	9:25:46 AM	H2 valve closed
5/12/2011	9:25:46 AM	BCl3 valve closed
5/12/2011	9:25:46 AM	PH3 valve closed
5/12/2011	9:25:46 AM	SiCl4 pre valve closed
5/12/2011	9:25:46 AM	SiCl4 post valve closed
5/12/2011	9:25:46 AM	Main Vac valve closed
5/12/2011	9:25:46 AM	Bubbler valve closed
5/12/2011	9:25:46 AM	Bypass valve opened
5/12/2011	9:25:46 AM	Helium MFC set to  0.000000
5/12/2011	9:25:46 AM	H2 MFC set to  0.000000
5/12/2011	9:25:46 AM	BCl3 MFC set to  0.000000
5/12/2011	9:25:46 AM	PHl3 MFC set to  0.000000
5/12/2011	9:25:46 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:25:46 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:25:46 AM	Tube furnace set to 0
5/12/2011	9:25:47 AM	Helium valve closed
5/12/2011	9:25:47 AM	H2 valve closed
5/12/2011	9:25:47 AM	BCl3 valve closed
5/12/2011	9:25:47 AM	PH3 valve closed
5/12/2011	9:25:47 AM	SiCl4 pre valve closed
5/12/2011	9:25:47 AM	SiCl4 post valve closed
5/12/2011	9:25:47 AM	Bubbler valve closed
5/12/2011	9:25:47 AM	Main Vac valve opened
5/12/2011	9:25:47 AM	Bypass valve opened
5/12/2011	9:25:47 AM	Helium MFC set to  0.000000
5/12/2011	9:25:47 AM	H2 MFC set to  0.000000
5/12/2011	9:25:47 AM	BCl3 MFC set to  0.000000
5/12/2011	9:25:47 AM	PHl3 MFC set to  0.000000
5/12/2011	9:25:47 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:25:47 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:25:47 AM	Tube furnace set to 0
5/12/2011	9:25:50 AM	H2 valve closed
5/12/2011	9:25:50 AM	BCl3 valve closed
5/12/2011	9:25:50 AM	PH3 valve closed
5/12/2011	9:25:50 AM	SiCl4 pre valve closed
5/12/2011	9:25:50 AM	SiCl4 post valve closed
5/12/2011	9:25:50 AM	Bubbler valve closed
5/12/2011	9:25:50 AM	Helium valve opened
5/12/2011	9:25:50 AM	Main Vac valve opened
5/12/2011	9:25:50 AM	Bypass valve opened
5/12/2011	9:25:50 AM	Helium MFC set to  100.000000
5/12/2011	9:25:50 AM	H2 MFC set to  0.000000
5/12/2011	9:25:50 AM	BCl3 MFC set to  0.000000
5/12/2011	9:25:50 AM	PHl3 MFC set to  0.000000
5/12/2011	9:25:50 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:25:50 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:25:50 AM	Tube furnace set to 0
5/12/2011	9:26:50 AM	Helium valve closed
5/12/2011	9:26:50 AM	H2 valve closed
5/12/2011	9:26:50 AM	BCl3 valve closed
5/12/2011	9:26:50 AM	PH3 valve closed
5/12/2011	9:26:50 AM	SiCl4 pre valve closed
5/12/2011	9:26:50 AM	SiCl4 post valve closed
5/12/2011	9:26:50 AM	Bubbler valve closed
5/12/2011	9:26:50 AM	Main Vac valve opened
5/12/2011	9:26:50 AM	Bypass valve opened
5/12/2011	9:26:50 AM	Helium MFC set to  0.000000
5/12/2011	9:26:50 AM	H2 MFC set to  0.000000
5/12/2011	9:26:50 AM	BCl3 MFC set to  0.000000
5/12/2011	9:26:50 AM	PHl3 MFC set to  0.000000
5/12/2011	9:26:50 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:26:50 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:26:50 AM	Tube furnace set to 0
5/12/2011	9:27:50 AM	H2 valve closed
5/12/2011	9:27:50 AM	BCl3 valve closed
5/12/2011	9:27:50 AM	PH3 valve closed
5/12/2011	9:27:50 AM	SiCl4 pre valve closed
5/12/2011	9:27:50 AM	SiCl4 post valve closed
5/12/2011	9:27:50 AM	Bubbler valve closed
5/12/2011	9:27:50 AM	Helium valve opened
5/12/2011	9:27:50 AM	Main Vac valve opened
5/12/2011	9:27:50 AM	Bypass valve opened
5/12/2011	9:27:50 AM	Helium MFC set to  100.000000
5/12/2011	9:27:50 AM	H2 MFC set to  0.000000
5/12/2011	9:27:50 AM	BCl3 MFC set to  0.000000
5/12/2011	9:27:50 AM	PHl3 MFC set to  0.000000
5/12/2011	9:27:50 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:27:50 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:27:50 AM	Tube furnace set to 0
5/12/2011	9:28:19 AM	Helium valve closed
5/12/2011	9:28:19 AM	H2 valve closed
5/12/2011	9:28:19 AM	BCl3 valve closed
5/12/2011	9:28:19 AM	PH3 valve closed
5/12/2011	9:28:19 AM	SiCl4 pre valve closed
5/12/2011	9:28:19 AM	SiCl4 post valve closed
5/12/2011	9:28:19 AM	Bubbler valve closed
5/12/2011	9:28:19 AM	Main Vac valve opened
5/12/2011	9:28:19 AM	Bypass valve opened
5/12/2011	9:28:19 AM	Helium MFC set to  0.000000
5/12/2011	9:28:19 AM	H2 MFC set to  0.000000
5/12/2011	9:28:19 AM	BCl3 MFC set to  0.000000
5/12/2011	9:28:19 AM	PHl3 MFC set to  0.000000
5/12/2011	9:28:19 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:28:19 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:28:20 AM	Tube furnace set to 0
5/12/2011	9:28:33 AM	H2 valve closed
5/12/2011	9:28:33 AM	BCl3 valve closed
5/12/2011	9:28:33 AM	PH3 valve closed
5/12/2011	9:28:33 AM	SiCl4 pre valve closed
5/12/2011	9:28:33 AM	SiCl4 post valve closed
5/12/2011	9:28:33 AM	Bubbler valve closed
5/12/2011	9:28:33 AM	Helium valve opened
5/12/2011	9:28:33 AM	Main Vac valve opened
5/12/2011	9:28:33 AM	Bypass valve opened
5/12/2011	9:28:33 AM	Helium MFC set to  100.000000
5/12/2011	9:28:33 AM	H2 MFC set to  0.000000
5/12/2011	9:28:33 AM	BCl3 MFC set to  0.000000
5/12/2011	9:28:33 AM	PHl3 MFC set to  0.000000
5/12/2011	9:28:33 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:28:33 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:28:33 AM	Tube furnace set to 0
5/12/2011	9:28:35 AM	Helium valve closed
5/12/2011	9:28:35 AM	H2 valve closed
5/12/2011	9:28:35 AM	BCl3 valve closed
5/12/2011	9:28:35 AM	PH3 valve closed
5/12/2011	9:28:35 AM	SiCl4 pre valve closed
5/12/2011	9:28:35 AM	SiCl4 post valve closed
5/12/2011	9:28:35 AM	Bubbler valve closed
5/12/2011	9:28:35 AM	Main Vac valve opened
5/12/2011	9:28:35 AM	Bypass valve opened
5/12/2011	9:28:35 AM	Helium MFC set to  0.000000
5/12/2011	9:28:35 AM	H2 MFC set to  0.000000
5/12/2011	9:28:35 AM	BCl3 MFC set to  0.000000
5/12/2011	9:28:35 AM	PHl3 MFC set to  0.000000
5/12/2011	9:28:35 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:28:35 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:28:35 AM	Tube furnace set to 0
5/12/2011	9:29:35 AM	H2 valve closed
5/12/2011	9:29:35 AM	BCl3 valve closed
5/12/2011	9:29:35 AM	PH3 valve closed
5/12/2011	9:29:35 AM	SiCl4 pre valve closed
5/12/2011	9:29:35 AM	SiCl4 post valve closed
5/12/2011	9:29:35 AM	Bubbler valve closed
5/12/2011	9:29:35 AM	Helium valve opened
5/12/2011	9:29:35 AM	Main Vac valve opened
5/12/2011	9:29:35 AM	Bypass valve opened
5/12/2011	9:29:35 AM	Helium MFC set to  100.000000
5/12/2011	9:29:35 AM	H2 MFC set to  0.000000
5/12/2011	9:29:35 AM	BCl3 MFC set to  0.000000
5/12/2011	9:29:35 AM	PHl3 MFC set to  0.000000
5/12/2011	9:29:35 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:29:35 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:29:35 AM	Tube furnace set to 0
5/12/2011	9:30:35 AM	Helium valve closed
5/12/2011	9:30:35 AM	H2 valve closed
5/12/2011	9:30:35 AM	BCl3 valve closed
5/12/2011	9:30:35 AM	PH3 valve closed
5/12/2011	9:30:35 AM	SiCl4 pre valve closed
5/12/2011	9:30:35 AM	SiCl4 post valve closed
5/12/2011	9:30:35 AM	Bubbler valve closed
5/12/2011	9:30:35 AM	Main Vac valve opened
5/12/2011	9:30:35 AM	Bypass valve opened
5/12/2011	9:30:35 AM	Helium MFC set to  0.000000
5/12/2011	9:30:35 AM	H2 MFC set to  0.000000
5/12/2011	9:30:35 AM	BCl3 MFC set to  0.000000
5/12/2011	9:30:35 AM	PHl3 MFC set to  0.000000
5/12/2011	9:30:35 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:30:35 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:30:36 AM	Tube furnace set to 0
5/12/2011	9:31:36 AM	H2 valve closed
5/12/2011	9:31:36 AM	BCl3 valve closed
5/12/2011	9:31:36 AM	PH3 valve closed
5/12/2011	9:31:36 AM	SiCl4 pre valve closed
5/12/2011	9:31:36 AM	SiCl4 post valve closed
5/12/2011	9:31:36 AM	Bubbler valve closed
5/12/2011	9:31:36 AM	Helium valve opened
5/12/2011	9:31:36 AM	Main Vac valve opened
5/12/2011	9:31:36 AM	Bypass valve opened
5/12/2011	9:31:36 AM	Helium MFC set to  100.000000
5/12/2011	9:31:36 AM	H2 MFC set to  0.000000
5/12/2011	9:31:36 AM	BCl3 MFC set to  0.000000
5/12/2011	9:31:36 AM	PHl3 MFC set to  0.000000
5/12/2011	9:31:36 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:31:36 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:31:36 AM	Tube furnace set to 0
5/12/2011	9:32:36 AM	Helium valve closed
5/12/2011	9:32:36 AM	H2 valve closed
5/12/2011	9:32:36 AM	BCl3 valve closed
5/12/2011	9:32:36 AM	PH3 valve closed
5/12/2011	9:32:36 AM	SiCl4 pre valve closed
5/12/2011	9:32:36 AM	SiCl4 post valve closed
5/12/2011	9:32:36 AM	Bubbler valve closed
5/12/2011	9:32:36 AM	Main Vac valve opened
5/12/2011	9:32:36 AM	Bypass valve opened
5/12/2011	9:32:36 AM	Helium MFC set to  0.000000
5/12/2011	9:32:36 AM	H2 MFC set to  0.000000
5/12/2011	9:32:36 AM	BCl3 MFC set to  0.000000
5/12/2011	9:32:36 AM	PHl3 MFC set to  0.000000
5/12/2011	9:32:36 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:32:36 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:32:36 AM	Tube furnace set to 0
5/12/2011	9:33:36 AM	H2 valve closed
5/12/2011	9:33:36 AM	BCl3 valve closed
5/12/2011	9:33:36 AM	PH3 valve closed
5/12/2011	9:33:36 AM	SiCl4 pre valve closed
5/12/2011	9:33:36 AM	SiCl4 post valve closed
5/12/2011	9:33:36 AM	Bubbler valve closed
5/12/2011	9:33:36 AM	Helium valve opened
5/12/2011	9:33:36 AM	Main Vac valve opened
5/12/2011	9:33:36 AM	Bypass valve opened
5/12/2011	9:33:36 AM	Helium MFC set to  100.000000
5/12/2011	9:33:36 AM	H2 MFC set to  0.000000
5/12/2011	9:33:36 AM	BCl3 MFC set to  0.000000
5/12/2011	9:33:36 AM	PHl3 MFC set to  0.000000
5/12/2011	9:33:36 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:33:36 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:33:36 AM	Tube furnace set to 0
5/12/2011	9:34:36 AM	Helium valve closed
5/12/2011	9:34:36 AM	H2 valve closed
5/12/2011	9:34:36 AM	BCl3 valve closed
5/12/2011	9:34:36 AM	PH3 valve closed
5/12/2011	9:34:36 AM	SiCl4 pre valve closed
5/12/2011	9:34:36 AM	SiCl4 post valve closed
5/12/2011	9:34:36 AM	Bubbler valve closed
5/12/2011	9:34:36 AM	Main Vac valve opened
5/12/2011	9:34:36 AM	Bypass valve opened
5/12/2011	9:34:36 AM	Helium MFC set to  0.000000
5/12/2011	9:34:36 AM	H2 MFC set to  0.000000
5/12/2011	9:34:36 AM	BCl3 MFC set to  0.000000
5/12/2011	9:34:36 AM	PHl3 MFC set to  0.000000
5/12/2011	9:34:36 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:34:36 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:34:36 AM	Tube furnace set to 0
5/12/2011	9:35:36 AM	H2 valve closed
5/12/2011	9:35:36 AM	BCl3 valve closed
5/12/2011	9:35:36 AM	PH3 valve closed
5/12/2011	9:35:36 AM	SiCl4 pre valve closed
5/12/2011	9:35:36 AM	SiCl4 post valve closed
5/12/2011	9:35:36 AM	Bubbler valve closed
5/12/2011	9:35:36 AM	Helium valve opened
5/12/2011	9:35:36 AM	Main Vac valve opened
5/12/2011	9:35:36 AM	Bypass valve opened
5/12/2011	9:35:36 AM	Helium MFC set to  100.000000
5/12/2011	9:35:36 AM	H2 MFC set to  0.000000
5/12/2011	9:35:36 AM	BCl3 MFC set to  0.000000
5/12/2011	9:35:36 AM	PHl3 MFC set to  0.000000
5/12/2011	9:35:36 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:35:36 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:35:37 AM	Tube furnace set to 0
5/12/2011	9:36:37 AM	Helium valve closed
5/12/2011	9:36:37 AM	H2 valve closed
5/12/2011	9:36:37 AM	BCl3 valve closed
5/12/2011	9:36:37 AM	PH3 valve closed
5/12/2011	9:36:37 AM	SiCl4 pre valve closed
5/12/2011	9:36:37 AM	SiCl4 post valve closed
5/12/2011	9:36:37 AM	Bubbler valve closed
5/12/2011	9:36:37 AM	Main Vac valve opened
5/12/2011	9:36:37 AM	Bypass valve opened
5/12/2011	9:36:37 AM	Helium MFC set to  0.000000
5/12/2011	9:36:37 AM	H2 MFC set to  0.000000
5/12/2011	9:36:37 AM	BCl3 MFC set to  0.000000
5/12/2011	9:36:37 AM	PHl3 MFC set to  0.000000
5/12/2011	9:36:37 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:36:37 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:36:37 AM	Tube furnace set to 0
5/12/2011	9:37:37 AM	H2 valve closed
5/12/2011	9:37:37 AM	BCl3 valve closed
5/12/2011	9:37:37 AM	PH3 valve closed
5/12/2011	9:37:37 AM	SiCl4 pre valve closed
5/12/2011	9:37:37 AM	SiCl4 post valve closed
5/12/2011	9:37:37 AM	Bubbler valve closed
5/12/2011	9:37:37 AM	Helium valve opened
5/12/2011	9:37:37 AM	Main Vac valve opened
5/12/2011	9:37:37 AM	Bypass valve opened
5/12/2011	9:37:37 AM	Helium MFC set to  100.000000
5/12/2011	9:37:37 AM	H2 MFC set to  0.000000
5/12/2011	9:37:37 AM	BCl3 MFC set to  0.000000
5/12/2011	9:37:37 AM	PHl3 MFC set to  0.000000
5/12/2011	9:37:37 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:37:37 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:37:37 AM	Tube furnace set to 0
5/12/2011	9:38:37 AM	Helium valve closed
5/12/2011	9:38:37 AM	H2 valve closed
5/12/2011	9:38:37 AM	BCl3 valve closed
5/12/2011	9:38:37 AM	PH3 valve closed
5/12/2011	9:38:37 AM	SiCl4 pre valve closed
5/12/2011	9:38:37 AM	SiCl4 post valve closed
5/12/2011	9:38:37 AM	Bubbler valve closed
5/12/2011	9:38:37 AM	Main Vac valve opened
5/12/2011	9:38:37 AM	Bypass valve opened
5/12/2011	9:38:37 AM	Helium MFC set to  0.000000
5/12/2011	9:38:37 AM	H2 MFC set to  0.000000
5/12/2011	9:38:37 AM	BCl3 MFC set to  0.000000
5/12/2011	9:38:37 AM	PHl3 MFC set to  0.000000
5/12/2011	9:38:37 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:38:37 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:38:37 AM	Tube furnace set to 0
5/12/2011	9:39:37 AM	H2 valve closed
5/12/2011	9:39:37 AM	BCl3 valve closed
5/12/2011	9:39:37 AM	PH3 valve closed
5/12/2011	9:39:37 AM	SiCl4 pre valve closed
5/12/2011	9:39:37 AM	SiCl4 post valve closed
5/12/2011	9:39:37 AM	Bubbler valve closed
5/12/2011	9:39:37 AM	Helium valve opened
5/12/2011	9:39:37 AM	Main Vac valve opened
5/12/2011	9:39:37 AM	Bypass valve opened
5/12/2011	9:39:37 AM	Helium MFC set to  100.000000
5/12/2011	9:39:37 AM	H2 MFC set to  0.000000
5/12/2011	9:39:37 AM	BCl3 MFC set to  0.000000
5/12/2011	9:39:37 AM	PHl3 MFC set to  0.000000
5/12/2011	9:39:37 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:39:37 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:39:37 AM	Tube furnace set to 0
5/12/2011	9:40:37 AM	Helium valve closed
5/12/2011	9:40:37 AM	H2 valve closed
5/12/2011	9:40:37 AM	BCl3 valve closed
5/12/2011	9:40:37 AM	PH3 valve closed
5/12/2011	9:40:37 AM	SiCl4 pre valve closed
5/12/2011	9:40:37 AM	SiCl4 post valve closed
5/12/2011	9:40:37 AM	Bubbler valve closed
5/12/2011	9:40:37 AM	Main Vac valve opened
5/12/2011	9:40:37 AM	Bypass valve opened
5/12/2011	9:40:37 AM	Helium MFC set to  0.000000
5/12/2011	9:40:37 AM	H2 MFC set to  0.000000
5/12/2011	9:40:37 AM	BCl3 MFC set to  0.000000
5/12/2011	9:40:37 AM	PHl3 MFC set to  0.000000
5/12/2011	9:40:37 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:40:37 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:40:38 AM	Tube furnace set to 0
5/12/2011	9:41:38 AM	H2 valve closed
5/12/2011	9:41:38 AM	BCl3 valve closed
5/12/2011	9:41:38 AM	PH3 valve closed
5/12/2011	9:41:38 AM	SiCl4 pre valve closed
5/12/2011	9:41:38 AM	SiCl4 post valve closed
5/12/2011	9:41:38 AM	Bubbler valve closed
5/12/2011	9:41:38 AM	Helium valve opened
5/12/2011	9:41:38 AM	Main Vac valve opened
5/12/2011	9:41:38 AM	Bypass valve opened
5/12/2011	9:41:38 AM	Helium MFC set to  100.000000
5/12/2011	9:41:38 AM	H2 MFC set to  0.000000
5/12/2011	9:41:38 AM	BCl3 MFC set to  0.000000
5/12/2011	9:41:38 AM	PHl3 MFC set to  0.000000
5/12/2011	9:41:38 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:41:38 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:41:38 AM	Tube furnace set to 0
5/12/2011	9:42:38 AM	Helium valve closed
5/12/2011	9:42:38 AM	H2 valve closed
5/12/2011	9:42:38 AM	BCl3 valve closed
5/12/2011	9:42:38 AM	PH3 valve closed
5/12/2011	9:42:38 AM	SiCl4 pre valve closed
5/12/2011	9:42:38 AM	SiCl4 post valve closed
5/12/2011	9:42:38 AM	Bubbler valve closed
5/12/2011	9:42:38 AM	Main Vac valve opened
5/12/2011	9:42:38 AM	Bypass valve opened
5/12/2011	9:42:38 AM	Helium MFC set to  0.000000
5/12/2011	9:42:38 AM	H2 MFC set to  0.000000
5/12/2011	9:42:38 AM	BCl3 MFC set to  0.000000
5/12/2011	9:42:38 AM	PHl3 MFC set to  0.000000
5/12/2011	9:42:38 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:42:38 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:42:38 AM	Tube furnace set to 0
5/12/2011	9:42:39 AM	Run finished at 9:42 AM
5/12/2011	9:42:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/12/2011	9:59:14 AM	Recipe started at 9:59 AM
5/12/2011	9:59:14 AM	Helium valve closed
5/12/2011	9:59:14 AM	BCl3 valve closed
5/12/2011	9:59:14 AM	PH3 valve closed
5/12/2011	9:59:14 AM	SiCl4 pre valve closed
5/12/2011	9:59:14 AM	SiCl4 post valve closed
5/12/2011	9:59:14 AM	Main Vac valve closed
5/12/2011	9:59:14 AM	Bypass valve closed
5/12/2011	9:59:14 AM	Bubbler valve closed
5/12/2011	9:59:14 AM	H2 valve opened
5/12/2011	9:59:14 AM	Helium MFC set to  0.000000
5/12/2011	9:59:14 AM	H2 MFC set to  500.000000
5/12/2011	9:59:14 AM	BCl3 MFC set to  0.000000
5/12/2011	9:59:14 AM	PHl3 MFC set to  0.000000
5/12/2011	9:59:14 AM	SiCl4 MFC set to  0.000000
5/12/2011	9:59:14 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	9:59:14 AM	Tube furnace set to 0
5/12/2011	10:00:37 AM	Helium valve closed
5/12/2011	10:00:37 AM	BCl3 valve closed
5/12/2011	10:00:37 AM	PH3 valve closed
5/12/2011	10:00:37 AM	SiCl4 pre valve closed
5/12/2011	10:00:37 AM	SiCl4 post valve closed
5/12/2011	10:00:37 AM	Main Vac valve closed
5/12/2011	10:00:37 AM	Bypass valve closed
5/12/2011	10:00:37 AM	H2 valve opened
5/12/2011	10:00:37 AM	Bubbler valve opened
5/12/2011	10:00:37 AM	Helium MFC set to  0.000000
5/12/2011	10:00:37 AM	H2 MFC set to  500.000000
5/12/2011	10:00:37 AM	BCl3 MFC set to  0.000000
5/12/2011	10:00:37 AM	PHl3 MFC set to  0.000000
5/12/2011	10:00:37 AM	SiCl4 MFC set to  0.000000
5/12/2011	10:00:37 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	10:00:37 AM	Tube furnace set to 1000
5/12/2011	10:20:37 AM	Helium valve closed
5/12/2011	10:20:37 AM	BCl3 valve closed
5/12/2011	10:20:37 AM	Main Vac valve closed
5/12/2011	10:20:37 AM	Bypass valve closed
5/12/2011	10:20:37 AM	H2 valve opened
5/12/2011	10:20:37 AM	PH3 valve opened
5/12/2011	10:20:37 AM	SiCl4 pre valve opened
5/12/2011	10:20:37 AM	SiCl4 post valve opened
5/12/2011	10:20:37 AM	Bubbler valve opened
5/12/2011	10:20:37 AM	Helium MFC set to  0.000000
5/12/2011	10:20:37 AM	H2 MFC set to  500.000000
5/12/2011	10:20:37 AM	BCl3 MFC set to  0.000000
5/12/2011	10:20:37 AM	PHl3 MFC set to  1.000000
5/12/2011	10:20:37 AM	SiCl4 MFC set to  50.000000
5/12/2011	10:20:37 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	10:20:37 AM	Tube furnace set to 1000
5/12/2011	10:35:37 AM	H2 valve closed
5/12/2011	10:35:37 AM	BCl3 valve closed
5/12/2011	10:35:37 AM	PH3 valve closed
5/12/2011	10:35:37 AM	SiCl4 pre valve closed
5/12/2011	10:35:37 AM	SiCl4 post valve closed
5/12/2011	10:35:37 AM	Main Vac valve closed
5/12/2011	10:35:37 AM	Bypass valve closed
5/12/2011	10:35:37 AM	Helium valve opened
5/12/2011	10:35:37 AM	Bubbler valve opened
5/12/2011	10:35:37 AM	Helium MFC set to  500.000000
5/12/2011	10:35:37 AM	H2 MFC set to  0.000000
5/12/2011	10:35:37 AM	BCl3 MFC set to  0.000000
5/12/2011	10:35:37 AM	PHl3 MFC set to  0.000000
5/12/2011	10:35:37 AM	SiCl4 MFC set to  0.000000
5/12/2011	10:35:37 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	10:35:37 AM	Tube furnace set to 0
5/12/2011	10:55:37 AM	Helium valve closed
5/12/2011	10:55:37 AM	H2 valve closed
5/12/2011	10:55:37 AM	BCl3 valve closed
5/12/2011	10:55:37 AM	PH3 valve closed
5/12/2011	10:55:37 AM	SiCl4 pre valve closed
5/12/2011	10:55:37 AM	SiCl4 post valve closed
5/12/2011	10:55:37 AM	Main Vac valve closed
5/12/2011	10:55:37 AM	Bypass valve closed
5/12/2011	10:55:37 AM	Bubbler valve closed
5/12/2011	10:55:37 AM	Helium MFC set to  0.000000
5/12/2011	10:55:37 AM	H2 MFC set to  0.000000
5/12/2011	10:55:37 AM	BCl3 MFC set to  0.000000
5/12/2011	10:55:37 AM	PHl3 MFC set to  0.000000
5/12/2011	10:55:37 AM	SiCl4 MFC set to  0.000000
5/12/2011	10:55:37 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	10:55:37 AM	Tube furnace set to 0
5/12/2011	10:55:38 AM	Run finished at 10:55 AM
5/12/2011	11:07:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/12/2011	11:07:28 AM	Recipe started at 11:07 AM
5/12/2011	11:07:28 AM	H2 valve closed
5/12/2011	11:07:28 AM	BCl3 valve closed
5/12/2011	11:07:28 AM	PH3 valve closed
5/12/2011	11:07:28 AM	SiCl4 pre valve closed
5/12/2011	11:07:28 AM	SiCl4 post valve closed
5/12/2011	11:07:28 AM	Main Vac valve closed
5/12/2011	11:07:28 AM	Bypass valve closed
5/12/2011	11:07:28 AM	Bubbler valve closed
5/12/2011	11:07:28 AM	Helium valve opened
5/12/2011	11:07:28 AM	Helium MFC set to  500.000000
5/12/2011	11:07:28 AM	H2 MFC set to  0.000000
5/12/2011	11:07:28 AM	BCl3 MFC set to  0.000000
5/12/2011	11:07:28 AM	PHl3 MFC set to  0.000000
5/12/2011	11:07:28 AM	SiCl4 MFC set to  0.000000
5/12/2011	11:07:28 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	11:07:29 AM	Tube furnace set to 0
5/12/2011	11:07:30 AM	Helium valve closed
5/12/2011	11:07:30 AM	H2 valve closed
5/12/2011	11:07:30 AM	BCl3 valve closed
5/12/2011	11:07:30 AM	PH3 valve closed
5/12/2011	11:07:30 AM	SiCl4 pre valve closed
5/12/2011	11:07:30 AM	SiCl4 post valve closed
5/12/2011	11:07:30 AM	Main Vac valve closed
5/12/2011	11:07:30 AM	Bypass valve closed
5/12/2011	11:07:30 AM	Bubbler valve closed
5/12/2011	11:07:30 AM	Helium MFC set to  0.000000
5/12/2011	11:07:30 AM	H2 MFC set to  0.000000
5/12/2011	11:07:30 AM	BCl3 MFC set to  0.000000
5/12/2011	11:07:30 AM	PHl3 MFC set to  0.000000
5/12/2011	11:07:30 AM	SiCl4 MFC set to  0.000000
5/12/2011	11:07:30 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	11:07:30 AM	Tube furnace set to 0
5/12/2011	11:07:30 AM	Run finished at 11:07 AM
5/12/2011	11:07:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/12/2011	11:59:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/12/2011	11:59:17 AM	Recipe started at 11:59 AM
5/12/2011	11:59:17 AM	Helium valve closed
5/12/2011	11:59:17 AM	H2 valve closed
5/12/2011	11:59:17 AM	BCl3 valve closed
5/12/2011	11:59:17 AM	PH3 valve closed
5/12/2011	11:59:17 AM	SiCl4 pre valve closed
5/12/2011	11:59:17 AM	SiCl4 post valve closed
5/12/2011	11:59:17 AM	Main Vac valve closed
5/12/2011	11:59:17 AM	Bubbler valve closed
5/12/2011	11:59:17 AM	Bypass valve opened
5/12/2011	11:59:17 AM	Helium MFC set to  0.000000
5/12/2011	11:59:17 AM	H2 MFC set to  0.000000
5/12/2011	11:59:17 AM	BCl3 MFC set to  0.000000
5/12/2011	11:59:17 AM	PHl3 MFC set to  0.000000
5/12/2011	11:59:17 AM	SiCl4 MFC set to  0.000000
5/12/2011	11:59:17 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	11:59:17 AM	Tube furnace set to 0
5/12/2011	11:59:52 AM	Helium valve closed
5/12/2011	11:59:52 AM	H2 valve closed
5/12/2011	11:59:52 AM	BCl3 valve closed
5/12/2011	11:59:52 AM	PH3 valve closed
5/12/2011	11:59:52 AM	SiCl4 pre valve closed
5/12/2011	11:59:52 AM	SiCl4 post valve closed
5/12/2011	11:59:52 AM	Bubbler valve closed
5/12/2011	11:59:52 AM	Main Vac valve opened
5/12/2011	11:59:52 AM	Bypass valve opened
5/12/2011	11:59:52 AM	Helium MFC set to  0.000000
5/12/2011	11:59:52 AM	H2 MFC set to  0.000000
5/12/2011	11:59:52 AM	BCl3 MFC set to  0.000000
5/12/2011	11:59:52 AM	PHl3 MFC set to  0.000000
5/12/2011	11:59:52 AM	SiCl4 MFC set to  0.000000
5/12/2011	11:59:52 AM	Bypass solenoid MFC set to  0.000000
5/12/2011	11:59:52 AM	Tube furnace set to 0
5/12/2011	12:00:52 PM	H2 valve closed
5/12/2011	12:00:52 PM	BCl3 valve closed
5/12/2011	12:00:52 PM	PH3 valve closed
5/12/2011	12:00:52 PM	SiCl4 pre valve closed
5/12/2011	12:00:52 PM	SiCl4 post valve closed
5/12/2011	12:00:52 PM	Bubbler valve closed
5/12/2011	12:00:52 PM	Helium valve opened
5/12/2011	12:00:52 PM	Main Vac valve opened
5/12/2011	12:00:52 PM	Bypass valve opened
5/12/2011	12:00:52 PM	Helium MFC set to  100.000000
5/12/2011	12:00:52 PM	H2 MFC set to  0.000000
5/12/2011	12:00:52 PM	BCl3 MFC set to  0.000000
5/12/2011	12:00:52 PM	PHl3 MFC set to  0.000000
5/12/2011	12:00:52 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:00:52 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:00:52 PM	Tube furnace set to 0
5/12/2011	12:01:52 PM	Helium valve closed
5/12/2011	12:01:52 PM	H2 valve closed
5/12/2011	12:01:52 PM	BCl3 valve closed
5/12/2011	12:01:52 PM	PH3 valve closed
5/12/2011	12:01:52 PM	SiCl4 pre valve closed
5/12/2011	12:01:52 PM	SiCl4 post valve closed
5/12/2011	12:01:52 PM	Bubbler valve closed
5/12/2011	12:01:52 PM	Main Vac valve opened
5/12/2011	12:01:52 PM	Bypass valve opened
5/12/2011	12:01:52 PM	Helium MFC set to  0.000000
5/12/2011	12:01:52 PM	H2 MFC set to  0.000000
5/12/2011	12:01:52 PM	BCl3 MFC set to  0.000000
5/12/2011	12:01:52 PM	PHl3 MFC set to  0.000000
5/12/2011	12:01:52 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:01:52 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:01:52 PM	Tube furnace set to 0
5/12/2011	12:02:52 PM	H2 valve closed
5/12/2011	12:02:52 PM	BCl3 valve closed
5/12/2011	12:02:52 PM	PH3 valve closed
5/12/2011	12:02:52 PM	SiCl4 pre valve closed
5/12/2011	12:02:52 PM	SiCl4 post valve closed
5/12/2011	12:02:52 PM	Bubbler valve closed
5/12/2011	12:02:52 PM	Helium valve opened
5/12/2011	12:02:52 PM	Main Vac valve opened
5/12/2011	12:02:52 PM	Bypass valve opened
5/12/2011	12:02:52 PM	Helium MFC set to  100.000000
5/12/2011	12:02:52 PM	H2 MFC set to  0.000000
5/12/2011	12:02:52 PM	BCl3 MFC set to  0.000000
5/12/2011	12:02:52 PM	PHl3 MFC set to  0.000000
5/12/2011	12:02:52 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:02:52 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:02:52 PM	Tube furnace set to 0
5/12/2011	12:03:52 PM	Helium valve closed
5/12/2011	12:03:52 PM	H2 valve closed
5/12/2011	12:03:52 PM	BCl3 valve closed
5/12/2011	12:03:52 PM	PH3 valve closed
5/12/2011	12:03:52 PM	SiCl4 pre valve closed
5/12/2011	12:03:52 PM	SiCl4 post valve closed
5/12/2011	12:03:52 PM	Bubbler valve closed
5/12/2011	12:03:52 PM	Main Vac valve opened
5/12/2011	12:03:52 PM	Bypass valve opened
5/12/2011	12:03:52 PM	Helium MFC set to  0.000000
5/12/2011	12:03:52 PM	H2 MFC set to  0.000000
5/12/2011	12:03:52 PM	BCl3 MFC set to  0.000000
5/12/2011	12:03:52 PM	PHl3 MFC set to  0.000000
5/12/2011	12:03:52 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:03:52 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:03:53 PM	Tube furnace set to 0
5/12/2011	12:04:53 PM	H2 valve closed
5/12/2011	12:04:53 PM	BCl3 valve closed
5/12/2011	12:04:53 PM	PH3 valve closed
5/12/2011	12:04:53 PM	SiCl4 pre valve closed
5/12/2011	12:04:53 PM	SiCl4 post valve closed
5/12/2011	12:04:53 PM	Bubbler valve closed
5/12/2011	12:04:53 PM	Helium valve opened
5/12/2011	12:04:53 PM	Main Vac valve opened
5/12/2011	12:04:53 PM	Bypass valve opened
5/12/2011	12:04:53 PM	Helium MFC set to  100.000000
5/12/2011	12:04:53 PM	H2 MFC set to  0.000000
5/12/2011	12:04:53 PM	BCl3 MFC set to  0.000000
5/12/2011	12:04:53 PM	PHl3 MFC set to  0.000000
5/12/2011	12:04:53 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:04:53 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:04:53 PM	Tube furnace set to 0
5/12/2011	12:05:53 PM	Helium valve closed
5/12/2011	12:05:53 PM	H2 valve closed
5/12/2011	12:05:53 PM	BCl3 valve closed
5/12/2011	12:05:53 PM	PH3 valve closed
5/12/2011	12:05:53 PM	SiCl4 pre valve closed
5/12/2011	12:05:53 PM	SiCl4 post valve closed
5/12/2011	12:05:53 PM	Bubbler valve closed
5/12/2011	12:05:53 PM	Main Vac valve opened
5/12/2011	12:05:53 PM	Bypass valve opened
5/12/2011	12:05:53 PM	Helium MFC set to  0.000000
5/12/2011	12:05:53 PM	H2 MFC set to  0.000000
5/12/2011	12:05:53 PM	BCl3 MFC set to  0.000000
5/12/2011	12:05:53 PM	PHl3 MFC set to  0.000000
5/12/2011	12:05:53 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:05:53 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:05:53 PM	Tube furnace set to 0
5/12/2011	12:06:53 PM	H2 valve closed
5/12/2011	12:06:53 PM	BCl3 valve closed
5/12/2011	12:06:53 PM	PH3 valve closed
5/12/2011	12:06:53 PM	SiCl4 pre valve closed
5/12/2011	12:06:53 PM	SiCl4 post valve closed
5/12/2011	12:06:53 PM	Bubbler valve closed
5/12/2011	12:06:53 PM	Helium valve opened
5/12/2011	12:06:53 PM	Main Vac valve opened
5/12/2011	12:06:53 PM	Bypass valve opened
5/12/2011	12:06:53 PM	Helium MFC set to  100.000000
5/12/2011	12:06:53 PM	H2 MFC set to  0.000000
5/12/2011	12:06:53 PM	BCl3 MFC set to  0.000000
5/12/2011	12:06:53 PM	PHl3 MFC set to  0.000000
5/12/2011	12:06:53 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:06:53 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:06:53 PM	Tube furnace set to 0
5/12/2011	12:07:53 PM	Helium valve closed
5/12/2011	12:07:53 PM	H2 valve closed
5/12/2011	12:07:53 PM	BCl3 valve closed
5/12/2011	12:07:53 PM	PH3 valve closed
5/12/2011	12:07:53 PM	SiCl4 pre valve closed
5/12/2011	12:07:53 PM	SiCl4 post valve closed
5/12/2011	12:07:53 PM	Bubbler valve closed
5/12/2011	12:07:53 PM	Main Vac valve opened
5/12/2011	12:07:53 PM	Bypass valve opened
5/12/2011	12:07:53 PM	Helium MFC set to  0.000000
5/12/2011	12:07:53 PM	H2 MFC set to  0.000000
5/12/2011	12:07:53 PM	BCl3 MFC set to  0.000000
5/12/2011	12:07:53 PM	PHl3 MFC set to  0.000000
5/12/2011	12:07:53 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:07:53 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:07:53 PM	Tube furnace set to 0
5/12/2011	12:08:53 PM	H2 valve closed
5/12/2011	12:08:53 PM	BCl3 valve closed
5/12/2011	12:08:53 PM	PH3 valve closed
5/12/2011	12:08:53 PM	SiCl4 pre valve closed
5/12/2011	12:08:53 PM	SiCl4 post valve closed
5/12/2011	12:08:53 PM	Bubbler valve closed
5/12/2011	12:08:53 PM	Helium valve opened
5/12/2011	12:08:53 PM	Main Vac valve opened
5/12/2011	12:08:53 PM	Bypass valve opened
5/12/2011	12:08:53 PM	Helium MFC set to  100.000000
5/12/2011	12:08:53 PM	H2 MFC set to  0.000000
5/12/2011	12:08:53 PM	BCl3 MFC set to  0.000000
5/12/2011	12:08:53 PM	PHl3 MFC set to  0.000000
5/12/2011	12:08:53 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:08:53 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:08:54 PM	Tube furnace set to 0
5/12/2011	12:09:54 PM	Helium valve closed
5/12/2011	12:09:54 PM	H2 valve closed
5/12/2011	12:09:54 PM	BCl3 valve closed
5/12/2011	12:09:54 PM	PH3 valve closed
5/12/2011	12:09:54 PM	SiCl4 pre valve closed
5/12/2011	12:09:54 PM	SiCl4 post valve closed
5/12/2011	12:09:54 PM	Bubbler valve closed
5/12/2011	12:09:54 PM	Main Vac valve opened
5/12/2011	12:09:54 PM	Bypass valve opened
5/12/2011	12:09:54 PM	Helium MFC set to  0.000000
5/12/2011	12:09:54 PM	H2 MFC set to  0.000000
5/12/2011	12:09:54 PM	BCl3 MFC set to  0.000000
5/12/2011	12:09:54 PM	PHl3 MFC set to  0.000000
5/12/2011	12:09:54 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:09:54 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:09:54 PM	Tube furnace set to 0
5/12/2011	12:10:54 PM	H2 valve closed
5/12/2011	12:10:54 PM	BCl3 valve closed
5/12/2011	12:10:54 PM	PH3 valve closed
5/12/2011	12:10:54 PM	SiCl4 pre valve closed
5/12/2011	12:10:54 PM	SiCl4 post valve closed
5/12/2011	12:10:54 PM	Bubbler valve closed
5/12/2011	12:10:54 PM	Helium valve opened
5/12/2011	12:10:54 PM	Main Vac valve opened
5/12/2011	12:10:54 PM	Bypass valve opened
5/12/2011	12:10:54 PM	Helium MFC set to  100.000000
5/12/2011	12:10:54 PM	H2 MFC set to  0.000000
5/12/2011	12:10:54 PM	BCl3 MFC set to  0.000000
5/12/2011	12:10:54 PM	PHl3 MFC set to  0.000000
5/12/2011	12:10:54 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:10:54 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:10:54 PM	Tube furnace set to 0
5/12/2011	12:11:54 PM	Helium valve closed
5/12/2011	12:11:54 PM	H2 valve closed
5/12/2011	12:11:54 PM	BCl3 valve closed
5/12/2011	12:11:54 PM	PH3 valve closed
5/12/2011	12:11:54 PM	SiCl4 pre valve closed
5/12/2011	12:11:54 PM	SiCl4 post valve closed
5/12/2011	12:11:54 PM	Bubbler valve closed
5/12/2011	12:11:54 PM	Main Vac valve opened
5/12/2011	12:11:54 PM	Bypass valve opened
5/12/2011	12:11:54 PM	Helium MFC set to  0.000000
5/12/2011	12:11:54 PM	H2 MFC set to  0.000000
5/12/2011	12:11:54 PM	BCl3 MFC set to  0.000000
5/12/2011	12:11:54 PM	PHl3 MFC set to  0.000000
5/12/2011	12:11:54 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:11:54 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:11:54 PM	Tube furnace set to 0
5/12/2011	12:12:54 PM	H2 valve closed
5/12/2011	12:12:54 PM	BCl3 valve closed
5/12/2011	12:12:54 PM	PH3 valve closed
5/12/2011	12:12:54 PM	SiCl4 pre valve closed
5/12/2011	12:12:54 PM	SiCl4 post valve closed
5/12/2011	12:12:54 PM	Bubbler valve closed
5/12/2011	12:12:54 PM	Helium valve opened
5/12/2011	12:12:54 PM	Main Vac valve opened
5/12/2011	12:12:54 PM	Bypass valve opened
5/12/2011	12:12:54 PM	Helium MFC set to  100.000000
5/12/2011	12:12:54 PM	H2 MFC set to  0.000000
5/12/2011	12:12:54 PM	BCl3 MFC set to  0.000000
5/12/2011	12:12:54 PM	PHl3 MFC set to  0.000000
5/12/2011	12:12:54 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:12:54 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:12:54 PM	Tube furnace set to 0
5/12/2011	12:13:54 PM	Helium valve closed
5/12/2011	12:13:54 PM	H2 valve closed
5/12/2011	12:13:54 PM	BCl3 valve closed
5/12/2011	12:13:54 PM	PH3 valve closed
5/12/2011	12:13:54 PM	SiCl4 pre valve closed
5/12/2011	12:13:54 PM	SiCl4 post valve closed
5/12/2011	12:13:54 PM	Bubbler valve closed
5/12/2011	12:13:54 PM	Main Vac valve opened
5/12/2011	12:13:54 PM	Bypass valve opened
5/12/2011	12:13:54 PM	Helium MFC set to  0.000000
5/12/2011	12:13:54 PM	H2 MFC set to  0.000000
5/12/2011	12:13:54 PM	BCl3 MFC set to  0.000000
5/12/2011	12:13:54 PM	PHl3 MFC set to  0.000000
5/12/2011	12:13:54 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:13:54 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:13:55 PM	Tube furnace set to 0
5/12/2011	12:14:55 PM	H2 valve closed
5/12/2011	12:14:55 PM	BCl3 valve closed
5/12/2011	12:14:55 PM	PH3 valve closed
5/12/2011	12:14:55 PM	SiCl4 pre valve closed
5/12/2011	12:14:55 PM	SiCl4 post valve closed
5/12/2011	12:14:55 PM	Bubbler valve closed
5/12/2011	12:14:55 PM	Helium valve opened
5/12/2011	12:14:55 PM	Main Vac valve opened
5/12/2011	12:14:55 PM	Bypass valve opened
5/12/2011	12:14:55 PM	Helium MFC set to  100.000000
5/12/2011	12:14:55 PM	H2 MFC set to  0.000000
5/12/2011	12:14:55 PM	BCl3 MFC set to  0.000000
5/12/2011	12:14:55 PM	PHl3 MFC set to  0.000000
5/12/2011	12:14:55 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:14:55 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:14:55 PM	Tube furnace set to 0
5/12/2011	12:15:55 PM	Helium valve closed
5/12/2011	12:15:55 PM	H2 valve closed
5/12/2011	12:15:55 PM	BCl3 valve closed
5/12/2011	12:15:55 PM	PH3 valve closed
5/12/2011	12:15:55 PM	SiCl4 pre valve closed
5/12/2011	12:15:55 PM	SiCl4 post valve closed
5/12/2011	12:15:55 PM	Bubbler valve closed
5/12/2011	12:15:55 PM	Main Vac valve opened
5/12/2011	12:15:55 PM	Bypass valve opened
5/12/2011	12:15:55 PM	Helium MFC set to  0.000000
5/12/2011	12:15:55 PM	H2 MFC set to  0.000000
5/12/2011	12:15:55 PM	BCl3 MFC set to  0.000000
5/12/2011	12:15:55 PM	PHl3 MFC set to  0.000000
5/12/2011	12:15:55 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:15:55 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:15:55 PM	Tube furnace set to 0
5/12/2011	12:16:55 PM	H2 valve closed
5/12/2011	12:16:55 PM	BCl3 valve closed
5/12/2011	12:16:55 PM	PH3 valve closed
5/12/2011	12:16:55 PM	SiCl4 pre valve closed
5/12/2011	12:16:55 PM	SiCl4 post valve closed
5/12/2011	12:16:55 PM	Bubbler valve closed
5/12/2011	12:16:55 PM	Helium valve opened
5/12/2011	12:16:55 PM	Main Vac valve opened
5/12/2011	12:16:55 PM	Bypass valve opened
5/12/2011	12:16:55 PM	Helium MFC set to  100.000000
5/12/2011	12:16:55 PM	H2 MFC set to  0.000000
5/12/2011	12:16:55 PM	BCl3 MFC set to  0.000000
5/12/2011	12:16:55 PM	PHl3 MFC set to  0.000000
5/12/2011	12:16:55 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:16:55 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:16:55 PM	Tube furnace set to 0
5/12/2011	12:17:55 PM	Helium valve closed
5/12/2011	12:17:55 PM	H2 valve closed
5/12/2011	12:17:55 PM	BCl3 valve closed
5/12/2011	12:17:55 PM	PH3 valve closed
5/12/2011	12:17:55 PM	SiCl4 pre valve closed
5/12/2011	12:17:55 PM	SiCl4 post valve closed
5/12/2011	12:17:55 PM	Bubbler valve closed
5/12/2011	12:17:55 PM	Main Vac valve opened
5/12/2011	12:17:55 PM	Bypass valve opened
5/12/2011	12:17:55 PM	Helium MFC set to  0.000000
5/12/2011	12:17:55 PM	H2 MFC set to  0.000000
5/12/2011	12:17:55 PM	BCl3 MFC set to  0.000000
5/12/2011	12:17:55 PM	PHl3 MFC set to  0.000000
5/12/2011	12:17:55 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:17:55 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:17:55 PM	Tube furnace set to 0
5/12/2011	12:18:55 PM	H2 valve closed
5/12/2011	12:18:55 PM	BCl3 valve closed
5/12/2011	12:18:55 PM	PH3 valve closed
5/12/2011	12:18:55 PM	SiCl4 pre valve closed
5/12/2011	12:18:55 PM	SiCl4 post valve closed
5/12/2011	12:18:55 PM	Bubbler valve closed
5/12/2011	12:18:55 PM	Helium valve opened
5/12/2011	12:18:55 PM	Main Vac valve opened
5/12/2011	12:18:55 PM	Bypass valve opened
5/12/2011	12:18:55 PM	Helium MFC set to  100.000000
5/12/2011	12:18:55 PM	H2 MFC set to  0.000000
5/12/2011	12:18:55 PM	BCl3 MFC set to  0.000000
5/12/2011	12:18:55 PM	PHl3 MFC set to  0.000000
5/12/2011	12:18:55 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:18:55 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:18:56 PM	Tube furnace set to 0
5/12/2011	12:19:56 PM	Helium valve closed
5/12/2011	12:19:56 PM	H2 valve closed
5/12/2011	12:19:56 PM	BCl3 valve closed
5/12/2011	12:19:56 PM	PH3 valve closed
5/12/2011	12:19:56 PM	SiCl4 pre valve closed
5/12/2011	12:19:56 PM	SiCl4 post valve closed
5/12/2011	12:19:56 PM	Bubbler valve closed
5/12/2011	12:19:56 PM	Main Vac valve opened
5/12/2011	12:19:56 PM	Bypass valve opened
5/12/2011	12:19:56 PM	Helium MFC set to  0.000000
5/12/2011	12:19:56 PM	H2 MFC set to  0.000000
5/12/2011	12:19:56 PM	BCl3 MFC set to  0.000000
5/12/2011	12:19:56 PM	PHl3 MFC set to  0.000000
5/12/2011	12:19:56 PM	SiCl4 MFC set to  0.000000
5/12/2011	12:19:56 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	12:19:56 PM	Tube furnace set to 0
5/12/2011	12:19:57 PM	Run finished at 12:19 PM
5/12/2011	12:19:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/12/2011	3:51:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/12/2011	3:51:36 PM	Recipe started at 3:51 PM
5/12/2011	3:51:36 PM	Helium valve closed
5/12/2011	3:51:36 PM	H2 valve closed
5/12/2011	3:51:36 PM	BCl3 valve closed
5/12/2011	3:51:36 PM	PH3 valve closed
5/12/2011	3:51:36 PM	SiCl4 pre valve closed
5/12/2011	3:51:36 PM	SiCl4 post valve closed
5/12/2011	3:51:36 PM	Main Vac valve closed
5/12/2011	3:51:36 PM	Bubbler valve closed
5/12/2011	3:51:36 PM	Bypass valve opened
5/12/2011	3:51:36 PM	Helium MFC set to  0.000000
5/12/2011	3:51:36 PM	H2 MFC set to  0.000000
5/12/2011	3:51:36 PM	BCl3 MFC set to  0.000000
5/12/2011	3:51:36 PM	PHl3 MFC set to  0.000000
5/12/2011	3:51:36 PM	SiCl4 MFC set to  0.000000
5/12/2011	3:51:36 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	3:51:36 PM	Tube furnace set to 0
5/12/2011	3:51:36 PM	Helium valve closed
5/12/2011	3:51:36 PM	H2 valve closed
5/12/2011	3:51:36 PM	BCl3 valve closed
5/12/2011	3:51:36 PM	PH3 valve closed
5/12/2011	3:51:36 PM	SiCl4 pre valve closed
5/12/2011	3:51:36 PM	SiCl4 post valve closed
5/12/2011	3:51:36 PM	Bubbler valve closed
5/12/2011	3:51:36 PM	Main Vac valve opened
5/12/2011	3:51:36 PM	Bypass valve opened
5/12/2011	3:51:36 PM	Helium MFC set to  0.000000
5/12/2011	3:51:36 PM	H2 MFC set to  0.000000
5/12/2011	3:51:36 PM	BCl3 MFC set to  0.000000
5/12/2011	3:51:36 PM	PHl3 MFC set to  0.000000
5/12/2011	3:51:36 PM	SiCl4 MFC set to  0.000000
5/12/2011	3:51:36 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	3:51:36 PM	Tube furnace set to 0
5/12/2011	3:52:36 PM	H2 valve closed
5/12/2011	3:52:36 PM	BCl3 valve closed
5/12/2011	3:52:36 PM	PH3 valve closed
5/12/2011	3:52:36 PM	SiCl4 pre valve closed
5/12/2011	3:52:36 PM	SiCl4 post valve closed
5/12/2011	3:52:36 PM	Bubbler valve closed
5/12/2011	3:52:36 PM	Helium valve opened
5/12/2011	3:52:36 PM	Main Vac valve opened
5/12/2011	3:52:36 PM	Bypass valve opened
5/12/2011	3:52:36 PM	Helium MFC set to  100.000000
5/12/2011	3:52:36 PM	H2 MFC set to  0.000000
5/12/2011	3:52:36 PM	BCl3 MFC set to  0.000000
5/12/2011	3:52:36 PM	PHl3 MFC set to  0.000000
5/12/2011	3:52:36 PM	SiCl4 MFC set to  0.000000
5/12/2011	3:52:36 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	3:52:36 PM	Tube furnace set to 0
5/12/2011	3:53:36 PM	Helium valve closed
5/12/2011	3:53:36 PM	H2 valve closed
5/12/2011	3:53:36 PM	BCl3 valve closed
5/12/2011	3:53:36 PM	PH3 valve closed
5/12/2011	3:53:36 PM	SiCl4 pre valve closed
5/12/2011	3:53:36 PM	SiCl4 post valve closed
5/12/2011	3:53:36 PM	Bubbler valve closed
5/12/2011	3:53:36 PM	Main Vac valve opened
5/12/2011	3:53:36 PM	Bypass valve opened
5/12/2011	3:53:36 PM	Helium MFC set to  0.000000
5/12/2011	3:53:36 PM	H2 MFC set to  0.000000
5/12/2011	3:53:36 PM	BCl3 MFC set to  0.000000
5/12/2011	3:53:37 PM	PHl3 MFC set to  0.000000
5/12/2011	3:53:37 PM	SiCl4 MFC set to  0.000000
5/12/2011	3:53:37 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	3:53:37 PM	Tube furnace set to 0
5/12/2011	3:54:37 PM	H2 valve closed
5/12/2011	3:54:37 PM	BCl3 valve closed
5/12/2011	3:54:37 PM	PH3 valve closed
5/12/2011	3:54:37 PM	SiCl4 pre valve closed
5/12/2011	3:54:37 PM	SiCl4 post valve closed
5/12/2011	3:54:37 PM	Bubbler valve closed
5/12/2011	3:54:37 PM	Helium valve opened
5/12/2011	3:54:37 PM	Main Vac valve opened
5/12/2011	3:54:37 PM	Bypass valve opened
5/12/2011	3:54:37 PM	Helium MFC set to  100.000000
5/12/2011	3:54:37 PM	H2 MFC set to  0.000000
5/12/2011	3:54:37 PM	BCl3 MFC set to  0.000000
5/12/2011	3:54:37 PM	PHl3 MFC set to  0.000000
5/12/2011	3:54:37 PM	SiCl4 MFC set to  0.000000
5/12/2011	3:54:37 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	3:54:37 PM	Tube furnace set to 0
5/12/2011	3:55:37 PM	Helium valve closed
5/12/2011	3:55:37 PM	H2 valve closed
5/12/2011	3:55:37 PM	BCl3 valve closed
5/12/2011	3:55:37 PM	PH3 valve closed
5/12/2011	3:55:37 PM	SiCl4 pre valve closed
5/12/2011	3:55:37 PM	SiCl4 post valve closed
5/12/2011	3:55:37 PM	Bubbler valve closed
5/12/2011	3:55:37 PM	Main Vac valve opened
5/12/2011	3:55:37 PM	Bypass valve opened
5/12/2011	3:55:37 PM	Helium MFC set to  0.000000
5/12/2011	3:55:37 PM	H2 MFC set to  0.000000
5/12/2011	3:55:37 PM	BCl3 MFC set to  0.000000
5/12/2011	3:55:37 PM	PHl3 MFC set to  0.000000
5/12/2011	3:55:37 PM	SiCl4 MFC set to  0.000000
5/12/2011	3:55:37 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	3:55:37 PM	Tube furnace set to 0
5/12/2011	3:56:37 PM	H2 valve closed
5/12/2011	3:56:37 PM	BCl3 valve closed
5/12/2011	3:56:37 PM	PH3 valve closed
5/12/2011	3:56:37 PM	SiCl4 pre valve closed
5/12/2011	3:56:37 PM	SiCl4 post valve closed
5/12/2011	3:56:37 PM	Bubbler valve closed
5/12/2011	3:56:37 PM	Helium valve opened
5/12/2011	3:56:37 PM	Main Vac valve opened
5/12/2011	3:56:37 PM	Bypass valve opened
5/12/2011	3:56:37 PM	Helium MFC set to  100.000000
5/12/2011	3:56:37 PM	H2 MFC set to  0.000000
5/12/2011	3:56:37 PM	BCl3 MFC set to  0.000000
5/12/2011	3:56:37 PM	PHl3 MFC set to  0.000000
5/12/2011	3:56:37 PM	SiCl4 MFC set to  0.000000
5/12/2011	3:56:37 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	3:56:37 PM	Tube furnace set to 0
5/12/2011	3:57:37 PM	Helium valve closed
5/12/2011	3:57:37 PM	H2 valve closed
5/12/2011	3:57:37 PM	BCl3 valve closed
5/12/2011	3:57:37 PM	PH3 valve closed
5/12/2011	3:57:37 PM	SiCl4 pre valve closed
5/12/2011	3:57:37 PM	SiCl4 post valve closed
5/12/2011	3:57:37 PM	Bubbler valve closed
5/12/2011	3:57:37 PM	Main Vac valve opened
5/12/2011	3:57:37 PM	Bypass valve opened
5/12/2011	3:57:37 PM	Helium MFC set to  0.000000
5/12/2011	3:57:37 PM	H2 MFC set to  0.000000
5/12/2011	3:57:37 PM	BCl3 MFC set to  0.000000
5/12/2011	3:57:37 PM	PHl3 MFC set to  0.000000
5/12/2011	3:57:37 PM	SiCl4 MFC set to  0.000000
5/12/2011	3:57:37 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	3:57:37 PM	Tube furnace set to 0
5/12/2011	3:58:37 PM	H2 valve closed
5/12/2011	3:58:37 PM	BCl3 valve closed
5/12/2011	3:58:37 PM	PH3 valve closed
5/12/2011	3:58:38 PM	SiCl4 pre valve closed
5/12/2011	3:58:38 PM	SiCl4 post valve closed
5/12/2011	3:58:38 PM	Bubbler valve closed
5/12/2011	3:58:38 PM	Helium valve opened
5/12/2011	3:58:38 PM	Main Vac valve opened
5/12/2011	3:58:38 PM	Bypass valve opened
5/12/2011	3:58:38 PM	Helium MFC set to  100.000000
5/12/2011	3:58:38 PM	H2 MFC set to  0.000000
5/12/2011	3:58:38 PM	BCl3 MFC set to  0.000000
5/12/2011	3:58:38 PM	PHl3 MFC set to  0.000000
5/12/2011	3:58:38 PM	SiCl4 MFC set to  0.000000
5/12/2011	3:58:38 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	3:58:38 PM	Tube furnace set to 0
5/12/2011	3:59:38 PM	Helium valve closed
5/12/2011	3:59:38 PM	H2 valve closed
5/12/2011	3:59:38 PM	BCl3 valve closed
5/12/2011	3:59:38 PM	PH3 valve closed
5/12/2011	3:59:38 PM	SiCl4 pre valve closed
5/12/2011	3:59:38 PM	SiCl4 post valve closed
5/12/2011	3:59:38 PM	Bubbler valve closed
5/12/2011	3:59:38 PM	Main Vac valve opened
5/12/2011	3:59:38 PM	Bypass valve opened
5/12/2011	3:59:38 PM	Helium MFC set to  0.000000
5/12/2011	3:59:38 PM	H2 MFC set to  0.000000
5/12/2011	3:59:38 PM	BCl3 MFC set to  0.000000
5/12/2011	3:59:38 PM	PHl3 MFC set to  0.000000
5/12/2011	3:59:38 PM	SiCl4 MFC set to  0.000000
5/12/2011	3:59:38 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	3:59:38 PM	Tube furnace set to 0
5/12/2011	4:00:38 PM	H2 valve closed
5/12/2011	4:00:38 PM	BCl3 valve closed
5/12/2011	4:00:38 PM	PH3 valve closed
5/12/2011	4:00:38 PM	SiCl4 pre valve closed
5/12/2011	4:00:38 PM	SiCl4 post valve closed
5/12/2011	4:00:38 PM	Bubbler valve closed
5/12/2011	4:00:38 PM	Helium valve opened
5/12/2011	4:00:38 PM	Main Vac valve opened
5/12/2011	4:00:38 PM	Bypass valve opened
5/12/2011	4:00:38 PM	Helium MFC set to  100.000000
5/12/2011	4:00:38 PM	H2 MFC set to  0.000000
5/12/2011	4:00:38 PM	BCl3 MFC set to  0.000000
5/12/2011	4:00:38 PM	PHl3 MFC set to  0.000000
5/12/2011	4:00:38 PM	SiCl4 MFC set to  0.000000
5/12/2011	4:00:38 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	4:00:38 PM	Tube furnace set to 0
5/12/2011	4:01:38 PM	Helium valve closed
5/12/2011	4:01:38 PM	H2 valve closed
5/12/2011	4:01:38 PM	BCl3 valve closed
5/12/2011	4:01:38 PM	PH3 valve closed
5/12/2011	4:01:38 PM	SiCl4 pre valve closed
5/12/2011	4:01:38 PM	SiCl4 post valve closed
5/12/2011	4:01:38 PM	Bubbler valve closed
5/12/2011	4:01:38 PM	Main Vac valve opened
5/12/2011	4:01:38 PM	Bypass valve opened
5/12/2011	4:01:38 PM	Helium MFC set to  0.000000
5/12/2011	4:01:38 PM	H2 MFC set to  0.000000
5/12/2011	4:01:38 PM	BCl3 MFC set to  0.000000
5/12/2011	4:01:38 PM	PHl3 MFC set to  0.000000
5/12/2011	4:01:38 PM	SiCl4 MFC set to  0.000000
5/12/2011	4:01:38 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	4:01:38 PM	Tube furnace set to 0
5/12/2011	4:02:38 PM	H2 valve closed
5/12/2011	4:02:38 PM	BCl3 valve closed
5/12/2011	4:02:38 PM	PH3 valve closed
5/12/2011	4:02:38 PM	SiCl4 pre valve closed
5/12/2011	4:02:38 PM	SiCl4 post valve closed
5/12/2011	4:02:38 PM	Bubbler valve closed
5/12/2011	4:02:38 PM	Helium valve opened
5/12/2011	4:02:38 PM	Main Vac valve opened
5/12/2011	4:02:38 PM	Bypass valve opened
5/12/2011	4:02:38 PM	Helium MFC set to  100.000000
5/12/2011	4:02:38 PM	H2 MFC set to  0.000000
5/12/2011	4:02:38 PM	BCl3 MFC set to  0.000000
5/12/2011	4:02:38 PM	PHl3 MFC set to  0.000000
5/12/2011	4:02:38 PM	SiCl4 MFC set to  0.000000
5/12/2011	4:02:38 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	4:02:38 PM	Tube furnace set to 0
5/12/2011	4:03:39 PM	Helium valve closed
5/12/2011	4:03:39 PM	H2 valve closed
5/12/2011	4:03:39 PM	BCl3 valve closed
5/12/2011	4:03:39 PM	PH3 valve closed
5/12/2011	4:03:39 PM	SiCl4 pre valve closed
5/12/2011	4:03:39 PM	SiCl4 post valve closed
5/12/2011	4:03:39 PM	Bubbler valve closed
5/12/2011	4:03:39 PM	Main Vac valve opened
5/12/2011	4:03:39 PM	Bypass valve opened
5/12/2011	4:03:39 PM	Helium MFC set to  0.000000
5/12/2011	4:03:39 PM	H2 MFC set to  0.000000
5/12/2011	4:03:39 PM	BCl3 MFC set to  0.000000
5/12/2011	4:03:39 PM	PHl3 MFC set to  0.000000
5/12/2011	4:03:39 PM	SiCl4 MFC set to  0.000000
5/12/2011	4:03:39 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	4:03:39 PM	Tube furnace set to 0
5/12/2011	4:04:39 PM	H2 valve closed
5/12/2011	4:04:39 PM	BCl3 valve closed
5/12/2011	4:04:39 PM	PH3 valve closed
5/12/2011	4:04:39 PM	SiCl4 pre valve closed
5/12/2011	4:04:39 PM	SiCl4 post valve closed
5/12/2011	4:04:39 PM	Bubbler valve closed
5/12/2011	4:04:39 PM	Helium valve opened
5/12/2011	4:04:39 PM	Main Vac valve opened
5/12/2011	4:04:39 PM	Bypass valve opened
5/12/2011	4:04:39 PM	Helium MFC set to  100.000000
5/12/2011	4:04:39 PM	H2 MFC set to  0.000000
5/12/2011	4:04:39 PM	BCl3 MFC set to  0.000000
5/12/2011	4:04:39 PM	PHl3 MFC set to  0.000000
5/12/2011	4:04:39 PM	SiCl4 MFC set to  0.000000
5/12/2011	4:04:39 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	4:04:39 PM	Tube furnace set to 0
5/12/2011	4:05:39 PM	Helium valve closed
5/12/2011	4:05:39 PM	H2 valve closed
5/12/2011	4:05:39 PM	BCl3 valve closed
5/12/2011	4:05:39 PM	PH3 valve closed
5/12/2011	4:05:39 PM	SiCl4 pre valve closed
5/12/2011	4:05:39 PM	SiCl4 post valve closed
5/12/2011	4:05:39 PM	Bubbler valve closed
5/12/2011	4:05:39 PM	Main Vac valve opened
5/12/2011	4:05:39 PM	Bypass valve opened
5/12/2011	4:05:39 PM	Helium MFC set to  0.000000
5/12/2011	4:05:39 PM	H2 MFC set to  0.000000
5/12/2011	4:05:39 PM	BCl3 MFC set to  0.000000
5/12/2011	4:05:39 PM	PHl3 MFC set to  0.000000
5/12/2011	4:05:39 PM	SiCl4 MFC set to  0.000000
5/12/2011	4:05:39 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	4:05:39 PM	Tube furnace set to 0
5/12/2011	4:06:39 PM	H2 valve closed
5/12/2011	4:06:39 PM	BCl3 valve closed
5/12/2011	4:06:39 PM	PH3 valve closed
5/12/2011	4:06:39 PM	SiCl4 pre valve closed
5/12/2011	4:06:39 PM	SiCl4 post valve closed
5/12/2011	4:06:39 PM	Bubbler valve closed
5/12/2011	4:06:39 PM	Helium valve opened
5/12/2011	4:06:39 PM	Main Vac valve opened
5/12/2011	4:06:39 PM	Bypass valve opened
5/12/2011	4:06:39 PM	Helium MFC set to  100.000000
5/12/2011	4:06:39 PM	H2 MFC set to  0.000000
5/12/2011	4:06:39 PM	BCl3 MFC set to  0.000000
5/12/2011	4:06:39 PM	PHl3 MFC set to  0.000000
5/12/2011	4:06:39 PM	SiCl4 MFC set to  0.000000
5/12/2011	4:06:39 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	4:06:39 PM	Tube furnace set to 0
5/12/2011	4:07:39 PM	Helium valve closed
5/12/2011	4:07:39 PM	H2 valve closed
5/12/2011	4:07:39 PM	BCl3 valve closed
5/12/2011	4:07:39 PM	PH3 valve closed
5/12/2011	4:07:39 PM	SiCl4 pre valve closed
5/12/2011	4:07:39 PM	SiCl4 post valve closed
5/12/2011	4:07:39 PM	Bubbler valve closed
5/12/2011	4:07:39 PM	Main Vac valve opened
5/12/2011	4:07:39 PM	Bypass valve opened
5/12/2011	4:07:39 PM	Helium MFC set to  0.000000
5/12/2011	4:07:39 PM	H2 MFC set to  0.000000
5/12/2011	4:07:39 PM	BCl3 MFC set to  0.000000
5/12/2011	4:07:39 PM	PHl3 MFC set to  0.000000
5/12/2011	4:07:39 PM	SiCl4 MFC set to  0.000000
5/12/2011	4:07:39 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	4:07:39 PM	Tube furnace set to 0
5/12/2011	4:08:40 PM	H2 valve closed
5/12/2011	4:08:40 PM	BCl3 valve closed
5/12/2011	4:08:40 PM	PH3 valve closed
5/12/2011	4:08:40 PM	SiCl4 pre valve closed
5/12/2011	4:08:40 PM	SiCl4 post valve closed
5/12/2011	4:08:40 PM	Bubbler valve closed
5/12/2011	4:08:40 PM	Helium valve opened
5/12/2011	4:08:40 PM	Main Vac valve opened
5/12/2011	4:08:40 PM	Bypass valve opened
5/12/2011	4:08:40 PM	Helium MFC set to  100.000000
5/12/2011	4:08:40 PM	H2 MFC set to  0.000000
5/12/2011	4:08:40 PM	BCl3 MFC set to  0.000000
5/12/2011	4:08:40 PM	PHl3 MFC set to  0.000000
5/12/2011	4:08:40 PM	SiCl4 MFC set to  0.000000
5/12/2011	4:08:40 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	4:08:40 PM	Tube furnace set to 0
5/12/2011	4:09:40 PM	Helium valve closed
5/12/2011	4:09:40 PM	H2 valve closed
5/12/2011	4:09:40 PM	BCl3 valve closed
5/12/2011	4:09:40 PM	PH3 valve closed
5/12/2011	4:09:40 PM	SiCl4 pre valve closed
5/12/2011	4:09:40 PM	SiCl4 post valve closed
5/12/2011	4:09:40 PM	Bubbler valve closed
5/12/2011	4:09:40 PM	Main Vac valve opened
5/12/2011	4:09:40 PM	Bypass valve opened
5/12/2011	4:09:40 PM	Helium MFC set to  0.000000
5/12/2011	4:09:40 PM	H2 MFC set to  0.000000
5/12/2011	4:09:40 PM	BCl3 MFC set to  0.000000
5/12/2011	4:09:40 PM	PHl3 MFC set to  0.000000
5/12/2011	4:09:40 PM	SiCl4 MFC set to  0.000000
5/12/2011	4:09:40 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	4:09:40 PM	Tube furnace set to 0
5/12/2011	4:10:40 PM	H2 valve closed
5/12/2011	4:10:40 PM	BCl3 valve closed
5/12/2011	4:10:40 PM	PH3 valve closed
5/12/2011	4:10:40 PM	SiCl4 pre valve closed
5/12/2011	4:10:40 PM	SiCl4 post valve closed
5/12/2011	4:10:40 PM	Bubbler valve closed
5/12/2011	4:10:40 PM	Helium valve opened
5/12/2011	4:10:40 PM	Main Vac valve opened
5/12/2011	4:10:40 PM	Bypass valve opened
5/12/2011	4:10:40 PM	Helium MFC set to  100.000000
5/12/2011	4:10:40 PM	H2 MFC set to  0.000000
5/12/2011	4:10:40 PM	BCl3 MFC set to  0.000000
5/12/2011	4:10:40 PM	PHl3 MFC set to  0.000000
5/12/2011	4:10:40 PM	SiCl4 MFC set to  0.000000
5/12/2011	4:10:40 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	4:10:40 PM	Tube furnace set to 0
5/12/2011	4:11:40 PM	Helium valve closed
5/12/2011	4:11:40 PM	H2 valve closed
5/12/2011	4:11:40 PM	BCl3 valve closed
5/12/2011	4:11:40 PM	PH3 valve closed
5/12/2011	4:11:40 PM	SiCl4 pre valve closed
5/12/2011	4:11:40 PM	SiCl4 post valve closed
5/12/2011	4:11:40 PM	Bubbler valve closed
5/12/2011	4:11:40 PM	Main Vac valve opened
5/12/2011	4:11:40 PM	Bypass valve opened
5/12/2011	4:11:40 PM	Helium MFC set to  0.000000
5/12/2011	4:11:40 PM	H2 MFC set to  0.000000
5/12/2011	4:11:40 PM	BCl3 MFC set to  0.000000
5/12/2011	4:11:40 PM	PHl3 MFC set to  0.000000
5/12/2011	4:11:40 PM	SiCl4 MFC set to  0.000000
5/12/2011	4:11:40 PM	Bypass solenoid MFC set to  0.000000
5/12/2011	4:11:40 PM	Tube furnace set to 0
5/12/2011	4:11:41 PM	Run finished at 4:11 PM
5/12/2011	4:11:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
